Title:
【発明の名称】半導体圧力センサ
Document Type and Number:
Japanese Patent JP2615940
Kind Code:
B2
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Inventors:
Masato Mizukoshi
Kawasaki Eiji
Kawasaki Eiji
Application Number:
JP28738988A
Publication Date:
June 04, 1997
Filing Date:
November 14, 1988
Export Citation:
Assignee:
株式会社デンソー
International Classes:
G01L9/04; G01L9/00; H01L29/84; (IPC1-7): G01L9/04
Domestic Patent References:
| JP56108278A |
Attorney, Agent or Firm:
Hirohiko Usui