Title:
【発明の名称】単結晶引上装置
Document Type and Number:
Japanese Patent JP3342625
Kind Code:
B2
Inventors:
Takashi Atami
Hisashi Furuya
Michio Kida
Hisashi Furuya
Michio Kida
Application Number:
JP34170395A
Publication Date:
November 11, 2002
Filing Date:
December 27, 1995
Export Citation:
Assignee:
Mitsubishi Materials Silicon Corporation
Mitsubishi Materials Corporation
Mitsubishi Materials Corporation
International Classes:
C30B15/02; C30B15/12; C30B29/06; H01L21/208; (IPC1-7): C30B15/12; C30B15/02; C30B29/06; H01L21/208
Domestic Patent References:
| JP585880A | ||||
| JP412086A | ||||
| JP7165488A | ||||
| JP57183392A | ||||
| JP4209790A | ||||
| JP4305091A | ||||
| JP5310495A | ||||
| JP57150560U |
Attorney, Agent or Firm:
Masatake Shiga (2 outside)