PURPOSE: To obtain a simple and compact integrated multifunction SPM sensor which can make AFM(interatomic force microscope) measurement, STM (scanning tunnel microscope) measurement or SNOM (near field microscope) measurement selectively while allowing simultaneous measurement of AFM and SNOM.

CONSTITUTION: The integrated multifunction SPM sensor comprises a cantilever part 27 provided with a probe 15a at the free end, a part 29 for supporting the base end of the cantilever part 27, a piezoelectric resistance layer 15 provided at the cantilever part 27 while being connected with a DC constant voltage power supply 33 through an electrode 17, a piezoelectric resistance layer 23 provided at the cantilever part 27 while being connected with a DC constant voltage power supply 37 through an electrode 25, operational amplifiers 35, 39 for ammeter detecting the current value of each piezoelectric resistance layer 15 when a sample is scanned by means of a probe 15a, and a circuit 41 for operating the surface information of the sample based on the variation in the current value detected through the operational amplifier 35, 39.