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Title:
【発明の名称】高周波測定用基板
Document Type and Number:
Japanese Patent JP3346732
Kind Code:
B2
Abstract:
A high frequency wave measurement substrate comprising a dielectric substrate, a ground conductor being formed almost all over a bottom surface of the dielectric substrate, a microstrip line signal conductor and an radial stub-like equivalent ground conductor which is placed in proximity to an end of the microstrip line signal conductor being formed on a top surface of the dielectric substrate, a coplanar line structure wafer probe signal conductor and a ground conductor being electrically connected to both the signal conductor and the equivalent ground conductor, wherein the equivalent ground conductor is composed of a semi-circular or fan-shaped radial stub-like conductor pattern in which non-conductor areas are formed in its radial direction. The equivalent ground conductor is also composed of a plurality of radial conductors which are sharing a center with each other, disposed like an arc, and different from each other in length in the radial direction, and a connecting conductor for electrically connecting the radial conductors to each other electrically. In the high-frequency wave measurement substrate a product of a thickness h of the substrate and a square root of a relative dielectric constant epsir of the substrate is set to be {fraction (1/12)} or more and ⅕ or less of a vacuum wavelength lambdmax of a measurement upper limit frequency. Consequently, the standing charge density distribution in the circumferential direction is caused by lower frequencies, so that the low loss transmission frequency band can be expanded.

Inventors:
Takehiro Okumichi
Application Number:
JP32148897A
Publication Date:
November 18, 2002
Filing Date:
November 21, 1997
Export Citation:
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Assignee:
Kyocera Corporation
International Classes:
G01R31/26; G01R1/06; H01P1/00; H01P1/24; H01P5/08; (IPC1-7): G01R1/06; G01R31/26; H01P1/00; H01P1/24; H01P5/08
Other References:
【文献】実用新案登録2507797(JP,Y2)