Title:
【発明の名称】基板処理方法及びその装置
Document Type and Number:
Japanese Patent JP3361676
Kind Code:
B2
Inventors:
Kenji Sugimoto
Hidekazu Inoue
Masami Ohtani
Hideyuki Taniguchi
Hidekazu Inoue
Masami Ohtani
Hideyuki Taniguchi
Application Number:
JP32988695A
Publication Date:
January 07, 2003
Filing Date:
November 24, 1995
Export Citation:
Assignee:
Dainippon Screen Mfg. Co., Ltd.
International Classes:
G03F7/16; G03F7/30; G11B7/26; H01L21/027; (IPC1-7): G03F7/30; G03F7/16; G11B7/26; H01L21/027
Domestic Patent References:
| JP2258082A | ||||
| JP265120A | ||||
| JP5269425A | ||||
| JP7161621A |
Attorney, Agent or Firm:
Tsutomu Sugitani