Title:
【発明の名称】超電導薄膜作成装置
Document Type and Number:
Japanese Patent JP2584633
Kind Code:
B2
Abstract:
PURPOSE:To form a superconductive thin film with the desired composition ratio by monitoring the gas pressure in a vacuum tank, comparing the measured value of the pressure in the vacuum tank with the preset value of the pressure in the vacuum tank preset in advance, and controlling the pressure in the vacuum tank. CONSTITUTION:In addition to the control of the evaporating speed of a superconductive material, the pressure signal in a vacuum tank 11 monitored by a vacuum measuring piece 1 and a vacuum meter 2 is sent to a pressure adjuster 3, and the measured value of the pressure in the vacuum tank 11 when a film is formed is compared with the preset value of the pressure in the vacuum tank 11 inputted to the pressure adjuster 3 in advance as the optimum value. If there is a difference between the measured value and the preset value, a comparison signal is sent to a gas guiding means 4 such as a gas flow adjuster or a variable flow leak valve or an exhaust speed variable unit 8 adjusting the exhaust speed of a vacuum pump so that the measured value matches with the preset value. The gas guide quantity or the gas exhaust speed is adjusted, and the optimum pressure is obtained. A superconductive thin film with the desired composition ratio can be thereby formed.
Inventors:
OOSAKO SHINJI
Application Number:
JP18188787A
Publication Date:
February 26, 1997
Filing Date:
July 20, 1987
Export Citation:
Assignee:
ANERUBA KK
International Classes:
H01L39/12; C23C14/06; C23C14/24; C30B29/22; H01B13/00; (IPC1-7): H01B13/00; C23C14/06; C23C14/24; C30B29/22; H01L39/12
Domestic Patent References:
| JP5710323A | ||||
| JP5358487A | ||||
| JP5399795A | ||||
| JP56133459A | ||||
| JP60155669A |
Attorney, Agent or Firm:
Koichi Hotate