Title:
【発明の名称】弾性表面波装置
Document Type and Number:
Japanese Patent JP3387060
Kind Code:
B2
Abstract:
An object of the invention is to provide a SAW device having an electrode film on a lithium tantalate substrate having a cut angle approximate to 36 degree rotated Y cut, the electrode film including an aluminum single crystal film having improved power durability. The SAW device has interdigital electrodes on a substrate. The substrate is constructed of a 38 to 44 degree rotated Y cut lithium tantalate single crystal, each interdigital electrode includes a titanium film and an aluminum film formed thereon, and the aluminum film is a single crystal film which develops only spots on selected area electron diffraction analysis.
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Inventors:
Satoshi Kimura
Masahiro Nakano
Katsuo Sato
Masahiro Nakano
Katsuo Sato
Application Number:
JP2000601280A
Publication Date:
March 17, 2003
Filing Date:
October 12, 1999
Export Citation:
Assignee:
TDK Co., Ltd.
International Classes:
H03H3/08; H03H9/02; H03H9/145; (IPC1-7): H03H9/145; H03H9/25
Other References:
木村悟利 中野正洋 佐藤勝男 中村僖良，Ｔｉバッファー層を利用したＳＡＷデバイス用Ａ１電極膜の解析，電子情報通信学会技術研究報告，１９９９年９月２１日，Ｖｏｌ．９９，Ｎｏ．３１４（ＵＳ９９−４５），７−１４
Attorney, Agent or Firm:
Youichi Ishii