PURPOSE: To detect ultrasonic waves with high sensitivity by forming a conductive driving electrode layer while being insulated from an electrode on one entire surface of a substrate excepting for the electrode and the peripheral part and laminating a piezoelectric converting means to the electrode and the driving electrode layer.
CONSTITUTION: Plural electrodes 41 is arranged on one face of a substrate 40, a conductive driving electrode layer 43 is formed on one entire face of the substrate 40 excepting for the electrodes 41 and peripheral parts 42 while being insulated from the electrodes 41, and a piezoelectric converting means 44 is laminated to the electrodes 41 and the electrode layer 43. Thus, a fixed position relation is also provided between the piezoelectric converting means 44 as the transmission part of ultrasonic waves and the electrodes 41 as the reception part. Further, signal voltages generated inside the pizeoelectric converting means 44 in areas faced to the respective electrodes 41 are outputted through respective correspondent electrodes 41, connecting means 47 and electric circuit 48. Thus, the signal voltages outputted from the respective electrodes 41 can be respectively efficiently transmitted.
YAMAGAMI HIROYUKI
SEGAMI TAKASHI
OCHIAI TSUTOMU
RION CO