Title:
【発明の名称】槽容器
Document Type and Number:
Japanese Patent JP2975832
Kind Code:
B2
Abstract:
A processing vessel in which a temperature control element (5) having a helical flow passage (9) formed on an outer surface of an inner barrel (6) containing a processing liquid and a heating or cooling temperature control medium caused to flow through the flow passage is disposed in a vessel body with a spacing formed between the temperature control element and an inner surface of the vessel body. The spacing between the vessel body and the temperature control element is closed at a certain position to form a closed chamber. Preferably, a system for generally equalizing the pressures in the inner barrel and the closed chamber is provided. The temperature control element can be assembled in the vessel body after being manufactured outside the vessel body. Therefore, the processing vessel can be manufactured at an improved efficiency and can be maintained by ordinary in-vessel maintenance operations.
Inventors:
MATSUKI NOBUO
NISHIMI HARUYUKI
NISHIMI HARUYUKI
Application Number:
JP35385693A
Publication Date:
November 10, 1999
Filing Date:
December 27, 1993
Export Citation:
Assignee:
SUMITOMO JUKIKAI KOGYO KK
International Classes:
B01J14/00; B01J3/04; B01J19/00; B01J19/24; F28D1/06; F28D9/00; (IPC1-7): B01J19/00; B01J14/00
Attorney, Agent or Firm:
Masanobu Kato (1 person outside)