Title:
【発明の名称】薄膜サーモパイル装置
Document Type and Number:
Japanese Patent JP2003506875
Kind Code:
A
Abstract:
There is disclosed a current generating arrangement having a plurality of thermocouples characterised in that the device comprises: a thick porous silicon layer; "hot" thermocouple contacts on said thick porous silicon layer; a bulk crystalline silicon member; and "cold" thermocouple contacts on said bulk, crystalline silicon layer.
Inventors:
Nasio Paul-Andora G
Panage Styrianos
Panage Styrianos
Application Number:
JP2001514491A
Publication Date:
February 18, 2003
Filing Date:
July 31, 2000
Export Citation:
Assignee:
Institute of Microelectronics
International Classes:
A63H33/22; A63H3/00; A63H3/38; H01L35/28; H01L35/30; H01L35/32; (IPC1-7): H01L35/32; A63H33/22; H01L35/28
Attorney, Agent or Firm:
Hiroo Suzuki