Title:
【発明の名称】ツーステージケミカル混合システム
Document Type and Number:
Japanese Patent JP2000500696
Kind Code:
A
Abstract:
A chemical mixing system for mixing ultra pure water and concentrated HF to a desired concentration within a qualification range. Batches of the mixed chemical are mixed in a relatively small mix vessel and transferred to a relatively large mix drum. The concentration of the chemical within the mix drum is measured by a concentration monitor. If the measured concentration of the chemical in the mix drum is within the qualification range, the batches of chemical in the mix vessel are mixed to the desired concentration. If the measured concentration of the chemical in the mix drum is below the qualification range, the batches of chemical in the mix vessel are mixed to a high concentration which is greater than the desired concentration. If the measured concentration of the chemical in the mix drum is above the qualification range, the batches of chemical in the mix vessel are mixed to a low concentration which is less than the desired concentration. Batch averaging is thereby performed to maintain the concentration of chemical in the mix drum within the desired qualification range.
Inventors:
Feri Edward T. Jr.
Gates Jay Tobin
Green Randall El.
Gates Jay Tobin
Green Randall El.
Application Number:
JP51830997A
Publication Date:
January 25, 2000
Filing Date:
November 07, 1996
Export Citation:
Assignee:
Applied Chemical Solutions Inc.
International Classes:
G05D11/13; B01F15/04; (IPC1-7): B01F15/04
Attorney, Agent or Firm:
Takehisa Ito (1 outside)