Title:
【発明の名称】ウェーハの研磨方法
Document Type and Number:
Japanese Patent JP3325650
Kind Code:
B2
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Inventors:
Yutaka Koma
Application Number:
JP11114593A
Publication Date:
September 17, 2002
Filing Date:
April 15, 1993
Export Citation:
Assignee:
Disco Co., Ltd.
International Classes:
B24B1/00; B24B41/06; H01L21/304; H01L21/68; H01L21/683; (IPC1-7): H01L21/304
Domestic Patent References:
| JP42146A |
Attorney, Agent or Firm:
Teruo Akimoto