Title:
【発明の名称】湿式研磨方法およびその装置
Document Type and Number:
Japanese Patent JP3094355
Kind Code:
B2
Inventors:
Shuji Kawasaki
Application Number:
JP21517993A
Publication Date:
October 03, 2000
Filing Date:
August 05, 1993
Export Citation:
Assignee:
BB F Yamate Co., Ltd.
Asahi Tec Co., Ltd.
Asahi Tec Co., Ltd.
International Classes:
B24B29/00; B24B57/02; (IPC1-7): B24B29/00; B24B57/02
Domestic Patent References:
| JP4146072A | ||||
| JP469161A | ||||
| JP60125055U | ||||
| JP60125056U |
Attorney, Agent or Firm:
Yuji Nozue