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Title:
【発明の名称】気密性セラミック塗膜及びその製造方法
Document Type and Number:
Japanese Patent JP2585548
Kind Code:
B2
Abstract:
PURPOSE:To rapidly produce the title ceramic coated film having excellent heat resistance by forming a coated film consisting of high-m.p. ceramic particles and carbosilane resin on the surface of a substrate, and treating the material with laser to form vitreous silica. CONSTITUTION:The coated film consisting of high-m.p. ceramic particles and carbosilane resin is formed on the surface of the substrate made of a metal. TiO2, SiC, etc., are used for the ceramic particles, and the particle diameter is preferably controlled to <=about 10mum. The coated film is dried or baked, and then treated with CO2 laser, etc. As a result, the resin is instantaneously decomposed, and molten silica is formed. The molten silica oozes out to the coated film surface, and is then quenched to form vitreous silica 2. The ceramic particles 1 in the coated film form a porous layer contg. voids 4 and having excellent thermal shock resistance. The material is then preferably heat-treated at >=about 600 deg.C to form a diffusion joint 3. Consequently, an airtight ceramic coated film capable of withstanding a high temp. of >=about 450 deg.C is obtained.

Inventors:
TOKARI OSAMU
TOMIKAWA MIZUKADO
MORI TAKAAKI
OOTSUKA NAOTAKE
AOKI SHIGERU
Application Number:
JP22051686A
Publication Date:
February 26, 1997
Filing Date:
September 18, 1986
Export Citation:
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Assignee:
CHIYODA CHEM ENG CONSTRUCT CO
International Classes:
C23C18/14; C23C26/00; C23C30/00; C23D5/04; (IPC1-7): C23C26/00; C23D5/04
Domestic Patent References:
JP6324077A
JP602697A
JP51143016A
Attorney, Agent or Firm:
Toshiaki Ikeura (1 outside)



 
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