Title:
【発明の名称】差動ポンピング能力を備えたクライオポンプ
Document Type and Number:
Japanese Patent JP3192143
Kind Code:
B2
Abstract:
A cryopump is capable of pumping a process chamber at a process pressure and differentially pumping a second chamber such as an RGA independently at a substantially lower pressure. A member extends through the cryopump housing into a low pressure region disposed within the second stage array. The member comprises a port for accessing the low pressure region, thus providing an independent differential pumping source. No physical seal is required between the member and the main cryopump volume to maintain the pressure differential.
Inventors:
Burt Lett, Allen Jei
Aitken, Douglas F
Aitken, Douglas F
Application Number:
JP50015393A
Publication Date:
July 23, 2001
Filing Date:
May 13, 1992
Export Citation:
Assignee:
Heritage Technology Corporation
International Classes:
F04B37/08; F04B37/16; (IPC1-7): F04B37/08; F04B37/16
Domestic Patent References:
| JP61502201A | ||||
| JP63501585A |
Attorney, Agent or Firm:
Heikichi Odashima