Title:
【発明の名称】多環式シクロペンタン‐2‐ジアゾ‐1,3‐ジオンを含有する深紫外フォトレジスト組成物
Document Type and Number:
Japanese Patent JP2986858
Kind Code:
B2
Abstract:
Photosensitizers containing saturated and unsaturated polycyclic compounds containing the cyclopentane-2-diazo-1,3-dione structural unit. These compounds have their maximum u.v. absorption at around 248 nm, decompose into polar products upon irradiation, and can be used as photosensitizers in positive deep u.v. or excimer laser (248 nm) lithography. They are most preferably useful with deep u.v. transparent resins for forming photoresists.
Inventors:
CHENJU U
AN EMU MUURINGU
JEEMUZU TEII YAADORII
AN EMU MUURINGU
JEEMUZU TEII YAADORII
Application Number:
JP17256090A
Publication Date:
December 06, 1999
Filing Date:
June 29, 1990
Export Citation:
Assignee:
KURARIANTO FUAINANSU BII BUI AI LTD
International Classes:
C07C13/10; C07C245/12; G03F7/016; G03F7/039; G03F7/004; H01L21/027; (IPC1-7): G03F7/004; C07C13/10; G03F7/016; H01L21/027
Domestic Patent References:
| JP53127496A | ||||
| JP561933A | ||||
| JP61240237A | ||||
| JP1106034A | ||||
| JP375751A |
Attorney, Agent or Firm:
Mitsufumi Esaki (2 others)