Title:
【発明の名称】薄膜機械特性の測定装置
Document Type and Number:
Japanese Patent JP2800561
Kind Code:
B2
Inventors:
Kenichiro Suzuki
Application Number:
JP13497492A
Publication Date:
September 21, 1998
Filing Date:
May 27, 1992
Export Citation:
Assignee:
NEC
International Classes:
G01L1/00; B81C99/00; G01M5/00; G01N3/00; G01N3/20; (IPC1-7): G01N3/00
Attorney, Agent or Firm:
Naoki Kyomoto (2 outside)