【発明の名称】エピタキシャル成長方法

Title:

【発明の名称】エピタキシャル成長方法

Document Type and Number:

Japanese Patent JP2569099

Kind Code:

B2

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Inventors:

Juichi Shimada
Miyano Masanobu
Akitoshi Ishizaka
Masakazu Ishino
Toshiyuki Yoshimura

Application Number:

JP32714487A

Publication Date:

January 08, 1997

Filing Date:

December 25, 1987

Export Citation:

Assignee:

株式会社日立製作所

International Classes:

H01L21/20; H01L21/203; H01L21/205; (IPC1-7): H01L21/20; H01L21/203; H01L21/205

Domestic Patent References:

JP62224946A
JP6398120A

Attorney, Agent or Firm:

Katsuo Ogawa (1 person outside)

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