X-RAY EXPOSURE DEVICE

Japanese Patent JPS607722

A

PURPOSE:To contrive to enhance uniformity of X-ray intensity distribution by a method wherein a means to measure X-ray intensity distribution at an exposing surface, and a means to transfer an exposing substance conforming to the X-ray intensity distribution thereof are provided. CONSTITUTION:An exposing substance 2 is put upon a transferably movable base 1. Detectors 3 of the plural number of pieces are arranged symmetrically centering the mechanically central axis of an X-ray source at the periphery of the movable base 1 thereof as an X-ray (b) intensity distibution measuring means. At the device thereof, when X-ray intensity distribution at an exposing surface put on with the substance 2 becomes ununiformly, differences are generated to detection outputs of the respective detectors 3. When the shape of the relative intensity distribution curve of the X-ray mentioned above is known, the movable base 1 is transferred, the movable base 1 is so transferred as to make the central position of X-ray intensity distribution and the central position of the substance 2 to coincide, and controlled as to make X-ray intensity distribution to become symmetrically centering the central position of the substance 2.

YAMABE MASAKI
KITAMURA YOSHITAKA
FURUKAWA YASUO

JP11557983A

January 16, 1985

June 27, 1983

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FUJITSU LTD

G03F7/20; H01L21/027; (IPC1-7): H01L21/30; G03F7/20

Koshiro Matsuoka

Next Patent: PLASMA X-RAY EXPOSING DEVICE