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Title:
【発明の名称】化学気相蒸着処理設備における処理用ガス供給装置
Document Type and Number:
Japanese Patent JPH0791649
Kind Code:
B2
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Inventors:
Masahiro Abe
Kazuhisa Okada
Application Number:
JP16197786A
Publication Date:
October 04, 1995
Filing Date:
July 11, 1986
Export Citation:
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Assignee:
Nippon Steel Tube Co., Ltd.
International Classes:
C21D8/12; C23C10/28; C23C16/24; C23C16/54; (IPC1-7): C23C16/24; C23C10/28; C23C16/54
Domestic Patent References:
JP53120686A
Attorney, Agent or Firm:
Shozo Yoshihara (2 outside)



 
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