Title:
【発明の名称】物品を輸送する方法と装置
Document Type and Number:
Japanese Patent JP2002540039
Kind Code:
A
Abstract:
In one embodiment, a cart (5) having a first vessel (10) which fits within a second vessel (90) is used to transport and store an integrated circuit substrate. The integrated circuit substrate is placed within the first vessel (10) and the door (18) of the first vessel (10) is closed and sealed against a door seal (24). The first vessel (10) is then purged with nitrogen to expel moisture and reactive gases from the interior of the first vessel (10). After purging, the first vessel (10) is then placed within the second vessel (90). The door (102) of the second vessel (90) is then closed and sealed against a door seal (104). The second vessel (90) is then purged with nitrogen to expel moisture and reactive gases from the interior of the second vessel (90). The cart (5) containing the integrated circuit substrate is then transported to the next manufacturing area. Integrated circuits and other articles may be manufacturing using the cart system of the present invention.
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Inventors:
Tanous, Adel Giyogi
McHamley, Khalid
Miller, Jeffry
McHamley, Khalid
Miller, Jeffry
Application Number:
JP2000607251A
Publication Date:
November 26, 2002
Filing Date:
March 23, 2000
Export Citation:
Assignee:
Allied Signal, Inc.
International Classes:
B65G1/00; F26B21/14; F26B25/06; H01L21/02; H01L21/673; H01L21/677; (IPC1-7): B65G1/00; H01L21/02
Attorney, Agent or Firm:
Yoshio Kawaguchi (5 outside)