Title:
【発明の名称】真空容器内の水素の排気方法とその装置
Document Type and Number:
Japanese Patent JP2938118
Kind Code:
B2
Abstract:
A method and apparatus for disharging hydrogen from a vacuum vessel (A) by means of a roughing vacuum pump (C) and a turbo-molecular pump (B). During discharge of hydrogen from the vacuum vessel, a material (D) which has excellent reactivity with hydrogen is introduced into the exhaust system. The material reacts with hydrogen to convert hydrogen into another substance of large molecular weight, whereby the evacuating performance of the vacuum exhaust system is improved with respect to discharging of hydrogen.
Inventors:
OKUMURA KATSUYA
OKANO HARUO
TSUJIMURA MANABU
SHIBATA AKIO
OKANO HARUO
TSUJIMURA MANABU
SHIBATA AKIO
Application Number:
JP6845990A
Publication Date:
August 23, 1999
Filing Date:
March 20, 1990
Export Citation:
Assignee:
TOSHIBA KK
EBARA SEISAKUSHO KK
EBARA SEISAKUSHO KK
International Classes:
B01J3/00; B01J3/02; B01J12/00; B01J19/08; B01J19/12; C01B5/00; C01B7/01; C01B7/19; (IPC1-7): B01J3/02
Domestic Patent References:
| JP6036791A | ||||
| JP2271098A |
Attorney, Agent or Firm:
Katsura Yoshimine (1 person outside)