Title:
【発明の名称】高硬度高密着性DLC膜の成膜方法
Document Type and Number:
Japanese Patent JP3034241
Kind Code:
B1
Inventors:
Masato Ban
Makoto Ryuji
Takeshi Hasegawa
Yukitaka Mori
Masakuni Tokai
Makoto Ryuji
Takeshi Hasegawa
Yukitaka Mori
Masakuni Tokai
Application Number:
JP32621898A
Publication Date:
April 17, 2000
Filing Date:
November 17, 1998
Export Citation:
Assignee:
Kawasaki Heavy Industries, Ltd.
International Classes:
C23C16/26; C23C16/27; (IPC1-7): C23C16/27
Domestic Patent References:
| JP10265955A | ||||
| JP3240957A | ||||
| JP10291895A | ||||
| JP610135A | ||||
| JP5124875A |
Attorney, Agent or Firm:
Masaharu Seki