【発明の名称】音響光学素子を用いた光学装置

Title:

【発明の名称】音響光学素子を用いた光学装置

Document Type and Number:

Japanese Patent JP2947920

Kind Code:

B2

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Inventors:

SAITO SUSUMU
YOSHINO TOSHIKAZU
NAGAI HIDEO
TABATA MITSUO
TOKI TATSUHIKO

Application Number:

JP30641490A

Publication Date:

September 13, 1999

Filing Date:

November 13, 1990

Export Citation:

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Assignee:

TOPUKON KK
TOSHIBA KK

International Classes:

G01B11/00; G02F1/33; G02F2/02; G03F9/00; H01L21/027; H01L21/30; H01S3/10; (IPC1-7): G01B11/00; G02F1/33; G02F2/02; G03F9/00; H01L21/027; H01S3/10

Domestic Patent References:

JP2227603A
JP63173902A

Attorney, Agent or Firm:

Minoru Nakamura (7 outside)

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