Title:
【発明の名称】光描画装置およびウェハ基板の光描画方法
Document Type and Number:
Japanese Patent JP2866267
Kind Code:
B2
Abstract:
An optical pattern projecting apparatus comprising a divergent mirror 16 for converting a light beam 13 from a light source 11 into a radially outwardly divergent light beam 13b and a convergent mirror 18 for converting the divergent light beam 13b into a radially inwardly convergent light beam 13d. The convergent light beam 13d is converted by a parallelizing mirror 17 into a parallel zonal ringed light beam 13e which is focused onto a surface of the work piece 15. A polarization beam splitter may be used for deflection-angular polarizing and splitting the light beam into an S-polarized light and a P-polarized light.
Inventors:
KAMON KAZUYA
Application Number:
JP33190292A
Publication Date:
March 08, 1999
Filing Date:
December 11, 1992
Export Citation:
Assignee:
MITSUBISHI DENKI KK
International Classes:
G02B7/28; G02B5/00; G02B17/06; G02B27/28; G03F1/00; G03F1/68; G03F7/20; G11B7/135; H01L21/027; H01L21/30; H01S3/101; (IPC1-7): H01L21/027; G02B7/28; G03F1/08; G03F7/20; G11B7/135; H01S3/101
Domestic Patent References:
| JP684760A | ||||
| JP547637A | ||||
| JP629188A | ||||
| JP5232397A | ||||
| JP594936A | ||||
| JP513301A |
Attorney, Agent or Firm:
Soga Doteru (6 people outside)