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Title:
ELECTROSTATIC CAPACITY TYPE FORCE SENSOR
Document Type and Number:
Japanese Patent JPH085481
Kind Code:
A
Abstract:

PURPOSE: To provide an accurate and reliable electrostatic capacity type force sensor by detecting the change of area of coverage by counterposed electrodes, as the variation of electrostatic each independently in the directions of X axis and Y axis thereby measuring the force from outside in two-dimensional areas.

CONSTITUTION: A transmitting electrode 1, at the center of a fixed electrode plate 8, and receiving electrodes 2c-2f in pairs are provided in the directions of X axis and Y axis orthogonal to the transmitting electrode 1, and a mobile electrode plate is provided capable of parallel shifting so that a mobile electrode 3 may be positioned, keeping a fixed interval between electrodes, in opposition to these electrodes. External force adds to the mobile electrode plate, and the mobile plate 3 shifts while maintaining the fixed interval between the electrodes in this direction. Accompanying the shifting of this mobile plate 3, the area of the coverage by the receiving electrodes 2c-2f changes, and this change is detected an electrostatic capacity, and the magnitude of the external force and the direction are measured.


Inventors:
ENDO KATSUNORI
Application Number:
JP15649994A
Publication Date:
January 12, 1996
Filing Date:
June 15, 1994
Export Citation:
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Assignee:
S K S KK
International Classes:
G01L1/14; G01L5/16; (IPC1-7): G01L5/16; G01L1/14