Title:
CARRIER DEVICE
Document Type and Number:
Japanese Patent JPS592341
Kind Code:
A
Abstract:
PURPOSE:To make the carriage of articles between two points at unspecific distance automatic and secure by a method wherein the secure carriage of a substrate receiving base is performed by double stage actions by using both of crank arms and the combination of a rack with a gear which functions as an auxiliary drive mechanism until the angle theta made between two crank arms take some value. CONSTITUTION:After the angle theta constituted by the crank arms 12 and 13 is made to take some value by rotating a rack drive motor 16, the substrate receiving base 11 is moved to the position B, i.e. the position shown by dotted lines in the figure by means of the crank arms 12 and 13 by switching to a crank arm drive motor 17. Here, the working of receiving and taking out the substrate 20 is performed. To return to the point A, the crank arm drive motor 17 is reversed, and thus the substrate receiving base 11 is moved to left by means of the crank arms 12 and 13. When the rack 19 engages a driven shaft gear 14, the substrate receiving base 11 is returned to the point A by switching from the crank arm drive motor 17 to the rack drive motor 16, resulting in finish of reciprocating motion.
Inventors:
TANAKA AKIHIRO
INOMATA SHIGEO
INOMATA SHIGEO
Application Number:
JP11102382A
Publication Date:
January 07, 1984
Filing Date:
June 28, 1982
Export Citation:
Assignee:
FUJITSU LTD
International Classes:
B65G35/00; H01L21/67; H01L21/677; H01L21/68; (IPC1-7): B65G35/00
Attorney, Agent or Firm:
Motoaki Hisagi
Next Patent: CARRYING DEVICE FOR LONG WORKPIECE