SURFACE TREATMENT OF FLUORIDE GLASS - NIPPON TELEGRAPH & TELEPHONE

Title:

SURFACE TREATMENT OF FLUORIDE GLASS

Document Type and Number:

Japanese Patent JPS60108349

Kind Code:

A

Abstract:

PURPOSE: To remove completely water, OH group, etc. remaining of the surface of glass without losing smoothness, by subjecting the surface of optically ground fluoride glass to high-frequency sputtering in a specific gas atmosphere.

CONSTITUTION: The optically previously ground fluoride glass 4 is attached to the chuck 6 of the rod supporting member 5 fixed to the column 7 and rotated. One or more gases selected from CF4, C2F6, C3F8, C4F10, CCl4, Cl2, F2, PCl3 CBrF3, BCl3, CHClF2, and CCl2F2 is fed from the intake vent 2 of the chamber 1, high-frequency electrical power is sent from the high-frequency electric source 12 to the high-frequency electrodes 11, the surface of the glass 4 is subjected to high-frequency sputtering, the surface of the glass 4 is thinly ground to removed adsorbed water, OH group, etc.

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Inventors:

OOISHI YASUTAKE
TAKAHASHI SHIROU
MITACHI NARIYUKI

Application Number:

JP21489683A

Publication Date:

June 13, 1985

Filing Date:

November 15, 1983

Export Citation:

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Assignee:

NIPPON TELEGRAPH & TELEPHONE

International Classes:

C03C15/00; C03B37/014; C03C23/00; (IPC1-7): C03C23/00

Attorney, Agent or Firm:

Masatake Shiga

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