Title:
METHOD OF PRODUCING THIN FILM CIRCUIT ELEMENT
Document Type and Number:
Japanese Patent JPS5843501
Kind Code:
A
Inventors:
SATOU SATOHIKO
Application Number:
JP14116881A
Publication Date:
March 14, 1983
Filing Date:
September 08, 1981
Export Citation:
Assignee:
NIPPON ELECTRIC CO
International Classes:
H01C17/30; C23F11/00; (IPC1-7): C23F11/00; H01C17/30
Attorney, Agent or Firm:
Uchihara Shin