Title:
MANUFACTURE OF PHOTOELECTRIC CONVERTOR
Document Type and Number:
Japanese Patent JPS6020586
Kind Code:
A
Abstract:
PURPOSE:To prevent the decline of the yield of manufacture caused by a difference of the positioning accuracy for compounding by almost equalizing the shapes and the structure of arrangement of the first electrode on the transparent substrate in the cell arranged in an active region, the non-single crystal semiconductor generating a photo- electromotive force by light irradiation on said first electrode and the second electrode on the semiconductor. CONSTITUTION:In each of the cells, the first conductive film is formed over the whole surface of substrate and further this conductive film is made into the predetermined shape by laser scribing to form the first open groove 16. Then cell regions 11, 13 and the electrode parts 8, 9 for external connection are formed. Next, the first electrode 3 is formed on a substrate 2 by the first transparent conductive film. Next, the non-single semiconductor 4 generating a photo-electromotive force by light irradication is formed with an uniform film thickness over the whole surface of the electrode 3 and the open groove 16 and further the second opening 15 is formed by laser light. After that, laser scribing is done to form an open groove 19 by removing the second conductive film and at least a part of the semiconductor under said film and oxidizing them to make them insulators. Furthermore, coating with the organic resin 22 is made for completion.
Inventors:
YAMAZAKI SHIYUNPEI
Application Number:
JP12827183A
Publication Date:
February 01, 1985
Filing Date:
July 13, 1983
Export Citation:
Assignee:
HANDOTAI ENERGY KENKYUSHO
International Classes:
H01L31/04; H01L27/142; (IPC1-7): H01L31/04
Domestic Patent References:
| JPS5753986A | 1982-03-31 | |||
| JPS57176778A | 1982-10-30 |