Title:
OBJECT SHAPE INSPECTOR
Document Type and Number:
Japanese Patent JPH04121614
Kind Code:
A
Abstract:
PURPOSE:To contrive the improvement in inspection speed by making an elliptic beam of light with the use of a cylindrical lens to deflect the elliptic beam of light of for scanning an object to be inspected in the direction of the minor axis thereof to detect the reflected light on both sides of the object to be inspected. CONSTITUTION:An elliptic beam of light by the use of a cylindrical lens 2 and a slit 3 is deflected in the direction of a line of a wire loop 51 of an object 6 to be inspected with the use of a polygonal mirror 4. The beam of light reflected with the use of the wire loop 51 is made incident on a linear CCD sensor 5. In the case of the normal wire loop 51, the reflected beam of light is divided into lead side light and chip side light respectively with the top thereof as a border. The distribution of beam strength on the linear CCD sensor 5 is determined according to the shape of the wire loop. In the case of the wire loop 51 of the bad shape, the reflected beam of light travels in the direction different from the normal shape thereof. Then go/no go is judged in accordance with the output of the CCD sensor 5.
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Inventors:
FUKUSHIMA MIKI
Application Number:
JP24216490A
Publication Date:
April 22, 1992
Filing Date:
September 12, 1990
Export Citation:
Assignee:
NEC CORP
International Classes:
G01B11/24; G01B11/245; H01L21/66; (IPC1-7): G01B11/24; H01L21/66
Attorney, Agent or Firm:
Uchihara Shin