PURPOSE: To grow a thin film at a high rate and to prevent damage to the thin film by subjecting gaseous raw materials to glow discharge decomposition in the presence of a magnetic field between electrodes for maintaining the electric discharge and disposing an intermediate electrode between said electrodes.
CONSTITUTION: A high frequency is thrown between an electrode 21 for maintaining electric discharge and a base body 3 as a counter electrode from a high- frequency power source 8 to induce glow discharge and further many permanent magnets 6 are disposed to close the generated plasma by the magnetic field so as to increase density and to accelerate the growing rate of a thin film with a vessel 1 which is provided with a gas supply system 11 and a gas discharge system 15 and grows the thin film on the cylindrical base body 3 by the glow discharge decomposition of the gaseous raw materials maintained under prescribed pressure. An intermediate electrode 5 such as a meshed electrode or the like is provided between the above-mentioned electrode 21 for maintaining the discharge and the base body 3 and a variable DC voltage 7 is impressed thereto to relieve ion bombardment and the prevent the damage by the ion bombardment. The body 3 is preferably rotated in an arrow (a) direction and is moved relatively with the magnets 6 to make the thin film uniform.
TERUNUMA KOUICHI
YAMAGUCHI MASAYASU
