【考案の名称】イオン源部真空排気装置

Title:

【考案の名称】イオン源部真空排気装置

Document Type and Number:

Japanese Patent JPS581958

Kind Code:

Y2

Inventors:

Sada Kawai
Susumu Yamada
Toyoichi Onishi

Application Number:

JP1778877U

Publication Date:

January 13, 1983

Filing Date:

February 15, 1977

Export Citation:

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Assignee:

Nissin High Voltage Co., Ltd.

International Classes:

H01J37/08; H01J7/14; H01J37/18; H01J37/30; H01J37/317; H01L21/265; H01L21/425; H05H5/00; (IPC1-7): H01J37/08; H01J37/18; H01J37/317

Attorney, Agent or Firm:

Nakazawa Sanosuke

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