Title:
HEATER FOR PUMP AND TURBO MOLECULAR PUMP WITH HEATER
Document Type and Number:
Japanese Patent JPS5932697
Kind Code:
A
Abstract:
In a heating arrangement for the high vacuum side of a turbo molecular pump, the rotor 2 of the pump is heated by means of a magnetic field, of which the field lines run perpendicular to the rotor axis. The magnetic field can be produced by means of permanent magnets 6 or by means of electro magnets 7. In the latter case the ohmic heat from the field windings of the electro magnets may be used to heat the stationary parts of the pump.
Inventors:
HAINRITSUHI ROTSUTSU
Application Number:
JP7887283A
Publication Date:
February 22, 1984
Filing Date:
May 04, 1983
Export Citation:
Assignee:
PFEIFFER VAKUUMTECHNIK
International Classes:
F04D19/04; F04D29/58; H05B6/02; (IPC1-7): F04D19/04; F04D29/58
Domestic Patent References:
| JPS5017687A | 1975-02-25 | |||
| JPS5134441A | 1976-03-24 |
Attorney, Agent or Firm:
Kyozo Yuasa