PURPOSE: To eliminate the decrease in the resolving power occuring in corona discharge particularly under high temp. and high humidity by providing a layer consisting of an amorphous material contg. at least carbon and halogen atom on the side of a photoconductive layer opposite from the base.
CONSTITUTION: While the amorphous silicon photoconductive layer formed on a base is held as it is in a vessel such as a bell-jar, a specified amt. of the gas of a compd. contg. carbon atom is introduced together with the gas of a compd. contg. silicon atom into said vessel and is subjected to glow discharge on the surface of the photoconductive layer under a high vacuum, by which the compd. contg. silicon atom and the compd. contg. carbon atom are decomposed and a low photoconductive overcoating layer consisting of amorphous silicon contg. the limited amt. of carbon atom is formed on the surface of said photoconductive layer. The thickness of the overcoating layer consisting of the amorphous silicon contg. the carbon atom formed in the above-mentioned way is selected usually from a 0.05W0.3μmm range.
KAWAJIRI KAZUHIRO
KIDO KEISHIROU
IIJIMA TOSHIO
NOZAKI NOBUHARU
