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Patent Searching and Data


Title:
PHOTORESIST DEVELOPER COMPOSITION CONTAIN NO METAL ION
Document Type and Number:
Japanese Patent JPS589143
Kind Code:
A
Inventors:
JIYON DATSUDOREI KAUSUTON
POORU EDOWAADO BETSUKAA JIYUNI
Application Number:
JP5947782A
Publication Date:
January 19, 1983
Filing Date:
April 09, 1982
Export Citation:
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Assignee:
SHIPLEY CO
International Classes:
G03F7/30; G03F7/32; (IPC1-7): G03C5/24; G03F7/00
Domestic Patent References:
JPS5474432A1979-06-14
JPS5351971A1978-05-11
JPS5264877A1977-05-28
Attorney, Agent or Firm:
Kyozo Yuasa



 
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