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Patent Searching and Data


Title:
BEAM ANALYSIS-GENERATION DEVICE
Document Type and Number:
Japanese Patent JPH04104440
Kind Code:
A
Abstract:

PURPOSE: To perform analysis-generation in a compact size and inexpensive cost even with non-charged particles by juxtaposing a plurality of slit boards wherein slit holes having a prescribed width are formed on a rotary shaft rotating while magnetically rising from a fixed shaft, in the rotary direction at a prescribed phase difference, at prescribed intervals.

CONSTITUTION: An incident beam (neutral particles, charged particles) 16 passes from incident side slit holes 4a of rotating plates 3 through passage side slit holes 4b to be taken out from a beam take-out opening 15. The slit holes 4a, 4b are provided in series with phase differences and spirally arranged and separation walls 18 are arranged between the slit boards 3 thereof. Then, the boards 3 are rotated in the arrow direction 19, the slit holes appear in succession on an incident position, and speed and distribution of passing beams are fixed by the positions and phase differences of the boards 3 and the holes 4a as well as a slit width and the number of sheets of intervals. Then, particles having a desired speed are taken out, and an analysis of the speed of particles, and analysis of energy is made possible with the speed.


Inventors:
YAMASHITA YOSHIMI
Application Number:
JP21937290A
Publication Date:
April 06, 1992
Filing Date:
August 21, 1990
Export Citation:
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Assignee:
FUJITSU LTD
International Classes:
H01J37/05; H01J37/30; H01L21/265; (IPC1-7): H01J37/05; H01J37/30; H01L21/265
Attorney, Agent or Firm:
Tadahiko Ito (2 outside)