Title:
APPARATUS FOR POSITIONING SURFACE
Document Type and Number:
Japanese Patent JPS6073511
Kind Code:
A
Inventors:
CHIYAARUZU EFU DEIMEI ZA SEKAN
Application Number:
JP17855984A
Publication Date:
April 25, 1985
Filing Date:
August 29, 1984
Export Citation:
Assignee:
PERKIN ELMER CORP
International Classes:
G01M11/00; G01M11/04; G02B7/00; G12B5/00; (IPC1-7): G01M11/00; G02B7/00
Domestic Patent References:
| JPS599984B2 | 1984-03-06 |
Foreign References:
| US3361444A | 1968-01-02 |
Attorney, Agent or Firm:
Toshio Yano