Title:
MANUFACTURE OF SILICON CARBIDE SINGLE CRYSTAL
Document Type and Number:
Japanese Patent JPS5954697
Kind Code:
A
Inventors:
GIYUNTAA CHIIGURAA
Application Number:
JP15012283A
Publication Date:
March 29, 1984
Filing Date:
August 17, 1983
Export Citation:
Assignee:
SIEMENS AG
International Classes:
C30B25/00; C30B23/00; C30B29/36; H01L21/205; (IPC1-7): C30B25/02; C30B29/36; H01L21/205
Other References:
JOURNAL OF CRYSTAL GROWTH=1976
Attorney, Agent or Firm:
Tomimura Kiyoshi