Title:
TREATMENT FOR PURIFICATION OF CARBON MEMBER
Document Type and Number:
Japanese Patent JPS5921598
Kind Code:
A
Abstract:
PURPOSE:To purify a carbon member disposed in a vacuum or a readuced pressure atmosphere to a high degree, by heating the carbon member up to a prescirbed temp. by high frequency induction heating and removing the impurities adsorbed thereon. CONSTITUTION:A treatment device for purifying a carbon member 7 is constituted of a quartz tube 1, a high-frequency coil 2, a flange 3 for closing the opening end of the tube 1, an evacuation tube 4 communicating with one end of the tube 1, a vacuum pump 5 and a three-way cock 6. The member 7 to be subjected to the purification tratment is held isolated thermally form the tube 1 by means of a heat insulator 8. Only the member 7 disposed in the tube 1 is heated without heating said tube in the treatment method for purification using such treatment device for purification. The evaporation of Si from the tube 1 is thus effectively suppressed and the contaimination by Si is decreased considerably. Since only the member 7 is selectively heated, the member 7 can be heated up to >=1,500 deg.C and the effect of the purification treatment is remarkably improved. The purification treatment is adequately adaptable to the carbon member that constitutes a necessary boat in the stage of epitaxial growth.
Inventors:
KAWABATA TOSHIHARU
FURUIKE SUSUMU
MATSUDA TOSHIO
IWASA HITOO
FURUIKE SUSUMU
MATSUDA TOSHIO
IWASA HITOO
Application Number:
JP13082682A
Publication Date:
February 03, 1984
Filing Date:
July 27, 1982
Export Citation:
Assignee:
MATSUSHITA ELECTRIC IND CO LTD
International Classes:
C01B31/02; C30B19/06; H01L21/208; (IPC1-7): C01B31/00; H01L21/208
Domestic Patent References:
| JPS5884181A | 1983-05-20 |
Attorney, Agent or Firm:
Akira Kobiji (2 outside)