Title:
CAVITY AXIS AIMING STEPWISE REPETITION ADJUSTING EXPOSURE DEVICE
Document Type and Number:
Japanese Patent JPS594124
Kind Code:
A
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Inventors:
EDOWAADO EICHI FUIRITSUPUSU
Application Number:
JP10909283A
Publication Date:
January 10, 1984
Filing Date:
June 17, 1983
Export Citation:
Assignee:
IITONNOPUTEIMETORITSUKUSU INC
International Classes:
G03B27/32; G03F7/20; G03F9/00; G05D3/00; G05D3/12; H01L21/027; H01L21/30; (IPC1-7): G03B27/32; G03F7/20; G03F9/00; G05D3/00; H01L21/30
Attorney, Agent or Firm:
Furuya Kaoru
Next Patent: CLEANING DEVICE