Title:
【考案の名称】ウエーハ把持工具
Document Type and Number:
Japanese Patent JPH04130444
Kind Code:
U
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Inventors:
Osamu Imai
Application Number:
JP3672591U
Publication Date:
November 30, 1992
Filing Date:
May 23, 1991
Export Citation:
International Classes:
B25B9/02; H01L21/677; H01L21/68; (IPC1-7): H01L21/68; B25B9/02