Title:
SUPPLY METHOD FOR SEMICONDUCTOR PELLET
Document Type and Number:
Japanese Patent JPS58137
Kind Code:
A
Abstract:
PURPOSE:To increase the supply unit of a large number of the square-shaped pellets in narrow space by forming a circular opening to the lower end of a square cylindrical carrier, laminating the pellets while being vertically held, pushing up the pellets at every predetermined pitch and extracting the pellets one by one from the rectangular opening of an upper end. CONSTITUTION:An upringht carrier row is transferred on a rail 19, the pellets 1 in the carrier are pushed up at one pitch by means of a pin 24 at a position P1, a beam receiver 33 detects the pellet 1'' of the uppermost layer when the pellets 1'' enters a hole 30, and push-up is stopped. When a collet 18 adsorbs and extracts the pellet 1'', projection 32 detects 33 the adsorption and extraction, and the pin is elevated again. when the pin finally reaches a top dead center, a switch 29 detects the reaching, and the pin is returned to a bottom dead center. In this case, the shutter 35 of the nose of the rail 19 is opened, the empty carrier 10 drops from a hole 34 and a plate 22 advances the carriers at one pitch. The same operation is mutually synchronized and conducted in parallel at positions P2....
Inventors:
TAKEMURA SEIICHI
Application Number:
JP9923381A
Publication Date:
January 05, 1983
Filing Date:
June 25, 1981
Export Citation:
Assignee:
NIPPON ELECTRIC CO
International Classes:
H01L21/52; H01L21/58; (IPC1-7): H01L21/58
Attorney, Agent or Firm:
Shogo Ehara
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