Title:
PREPARATION OF HIGH-QUALITY THIN SUPERCONDUCTING FILM OF OXIDE
Document Type and Number:
Japanese Patent JPH04114904
Kind Code:
A
Abstract:
PURPOSE: To obtain a high-quality thin superconducting film of oxide having excellent superconducting characteristics in forming a superconducting film of oxide on a substrate by laser ablation method by irradiating a target with laser beam and the substrate with oxide ion.
CONSTITUTION: In preparation of a thin film of oxide superconductor by laser ablation method of irradiating a target 6 with laser beam 1 to form a thin film on a substrate 4 arranged opposingly to the target 6, when the target 6 is irradiated with the laser beam 1, the substrate 4 is irradiated with oxide ion (oxide ion source 8, oxygen inlet 13, microwave guide 21, electromagnet 22, ion extracting electrode 23 and ion accelerating electrode 25).
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Inventors:
NAGAISHI RYUKI
OTA YUKIHIRO
FUJIMORI NAOHARU
OTA YUKIHIRO
FUJIMORI NAOHARU
Application Number:
JP23021890A
Publication Date:
April 15, 1992
Filing Date:
August 31, 1990
Export Citation:
Assignee:
SUMITOMO ELECTRIC INDUSTRIES
International Classes:
C01B13/14; C01G1/00; C30B29/22; H01B12/06; H01B13/00; H01L39/24; (IPC1-7): C01B13/14; C30B29/22; H01B12/06; H01B13/00; H01L39/24
Attorney, Agent or Firm:
Takashi Koshiba