PURPOSE: To make a titled device small-sized and inexpensive by providing a table which can move up and down, upper and lower measuring instruments for outputting a displacement of a thickness and a warp as an electric signal, a carrying device for carrying an object to be measured to a measuring position, and a driving device for lifting the lower measuring instrument.

CONSTITUTION: When a wafer 2 carried from the previous process by a round belt 14 contacts to a stopper pin 15, the belt 14 is stopped by a detection of a wafer detector (omitted in the figure). Also, a table 5 is lifted by a carrying device 26 consistng of a motor 18, a cam 19, a cam follower 20, and a slide plate 21, and a warp is measured by making an upper measuring instrument 8-1 contact to the wafer 2. Moreover, a lower measuring instrument 8-2 is lifted by a driving device 22 consisting of a holder 23, a slide plate 24 and a cylinder 25, and a thickness is measured by placing the wafer 2 between both the measuring instruments 8-1, 2.