Title:
VACUUM CVD APPARATUS
Document Type and Number:
Japanese Patent JPS5933823
Kind Code:
A
Abstract:
PURPOSE:To make it possible to load and unload a reactor core tube, in the unsupported state with its seal part bearing removed, into and from a reactor while maintaining the reactor core tube coaxially with the axis of the reactor and easily effect loading and unloading of the core tube, by a method wherein the core tube is centered at an end part of the reactor by supporting the core tube with a bearing and is loaded into and unloaded from the reactor by being slid on the bearing. CONSTITUTION:Normally, a lever 8 is in contact with a stopper pin 9 to restrict the movement of its lowering end, and a support member 6 is downwardly pressed at its lowermost position. To load or unload a core tube 2, a handle 7 is turned clockwise. Consequently, a roller 14 supported by the lever 8 rolls through a guide rail 15 of the support member 6 to upwardly push the support member 6 along guide shafts 11, 11. When the support member 6 is pushed up to a position where the axis of the core tube 2 supported by bearings 5, 5 coincides with the axis of a reactor 1, a ball 17 of a stopper pin 10 fits in a fitting hole 16 in the lever 8, so that the support member 6 is maintained at the position. Under this state, the core tube 2 is removed from the reactor 1 by being supported and slid on the bearings 5, 5.
Inventors:
TSUMURA SUEO
Application Number:
JP14382882A
Publication Date:
February 23, 1984
Filing Date:
August 19, 1982
Export Citation:
Assignee:
NIPPON ELECTRIC CO
International Classes:
H01L21/31; C23C16/54; H01L21/205; (IPC1-7): H01L21/31
Attorney, Agent or Firm:
Sugano Naka