PURPOSE: To obtain an ultrasonic wave motor which obtains a uniform contact state and has excellent durability by finishing the slide surfaces of a vibrator and a frictional material to have equivalent surface roughness by smoothing means.

CONSTITUTION: Al is used as the material of a vibrator 101, and composite plastic containing carbon fiber is used as the material of a frictional material 104. The vibrator 101 is formed in shape from a round rod material made of Al by an NC lathe, and its slide surface is finished by cutting. The material 104 is formed in its profile by injection molding, adhesively secured to a moving body 103, and its slide surface is finished by cutting. Then, the slide surface of the material 104 of this ultrasonic wave motor is lapped by abrasive. Further, the side surface of the vibrator 101 is lapped with the abrasive similarly to the material 104. Thus, when the side surfaces of both the materials 101 and 104 are similarly lapped, they are best.