PURPOSE: To manufacture rapidly a high quality body for retaining an electrostatic latent image by forming a photoconductive layer of amorphous silicon (a-Si) having a multilayered structure on a support by a specified plasma discharge method using two kinds of gaseous silanes.
CONSTITUTION: An electrically conductive support 1 such as an Al cylinder having a super-finished surface is placed in a gaseous silane atmosphere, and a photoconductive layer 2 is formed on the surface of the support by depositing a-Si by plasma discharge to manufacture a body 7 for retaining an electrostatic latent image. In this method, the 1st a-Si layer 3 of about 1μm thickness is formed in a gaseous monosilane atmosphere, the 2nd a-Si layer 4 of about 18μm thickness is formed on the layer 3 in a gaseous disilane atmosphere, and the 3rd a-Si layer 5 of about 1μm thickness is formed on the layer 4 in a gaseous silane atmosphere to form the photoconductive a-Si layer 2 having a three-layered structure. The thickness of each of the 1st and the 3rd a-Si layers is ≤ about 10% of the thickness of the photoconductive layer.
GOTOU KAZUYUKI
SHIRAKU HISAO
OONISHI MICHITOSHI
KUWANO YUKINORI
