Title:
【考案の名称】メツキ金属蒸発源のシ-ル装置
Document Type and Number:
Japanese Patent JPS5883461
Kind Code:
U
Inventors:
Heizaburo Furukawa
Wake Kanji
Kenichi Yanagi
Tetsuyoshi Wada
Shigeo Itano
Wake Kanji
Kenichi Yanagi
Tetsuyoshi Wada
Shigeo Itano
Application Number:
JP17865981U
Publication Date:
June 06, 1983
Filing Date:
December 02, 1981
Export Citation:
International Classes:
C23C14/24; (IPC1-7): C23C13/12
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