To sufficiently suppress vibration generated in a controlled target even when there is a modeling error by including a condition for describing a manipulated variable by a polynomial in time in restriction conditions and finding out a manipulated variable for positioning the controlled target on a stop position by the use of mathematical programming.
A track signal arithmetic part 8 operates a manipulated variable (u) for driving a servo motor 4. A driver input signal preparing part 9 operates the practical position of a table 2. A deviation between the operated practical table position and a driving signal (u) to be a table position command is found out, the deviation is multiplied by an engineering unit conversion coefficient and the obtained value is outputted to a servo driver 6 as a servo motor speed command signal. A condition for describing a manipulated variable by a polynomial in time is included in restriction conditions and a manipulated variable for moving the controlled target by a prescribed moving distance for prescribed time and positioning the controlled target on a stop position is found out by the use of mathematical programming.
ITO HIROYUKI